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CHIPS Metrology SBIR — Phase I

CHIPS Metrology SBIR — Phase I

Funds U.S. small businesses developing semiconductor measurement tools, instrumentation, and metrologies for the domestic chip-making supply chain.

The CHIPS Metrology SBIR Phase I was issued by the CHIPS for America R&D program office (CRDO) under NIST and the Department of Commerce in April 2024, as part of the broader $11 billion CHIPS R&D effort to advance U.S. semiconductor leadership. Phase I awards fund small businesses to explore the technical feasibility of novel ideas for products or services in the commercial microelectronics marke

Semiconductor metrology, including measurement services, manufacturing metrologies, assurance and provenance technologies, and advanced metrology R&D testbeds.

CycleiHow often this grant runs — e.g. annually, on a rolling basis, or a one-off call.One-off
Next deadlineiThe next date applications are due. Rolling means you can apply any time.
Decision timeiTypical time from the deadline to the funder's decision.14 weeks
Project durationiHow long the funded work is expected to run.6 months
Award typeiThe form of funding — grant, equity, loan, tax credit, etc.Grant
Match fundingiThe share of project costs you must cover yourself. 0% = fully funded.0%
Funding pooliThe total budget available across all awards in this round.$54M

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Last verified: 24 Jul 2026Source: www.nist.gov