CHIPS Metrology SBIR — Phase I

CHIPS Metrology SBIR — Phase I

Funds U.S. small businesses developing semiconductor measurement tools, instrumentation, and metrologies for the domestic chip-making supply chain.

Eligibility · United States only — must be a for-profit U.S. small business; all R&D must be performed in the U.S.

⚠ This may reflect a past cycle — verify the current call on the funder's site.

The CHIPS Metrology SBIR Phase I was issued by the CHIPS for America R&D program office (CRDO) under NIST and the Department of Commerce in April 2024, as part of the broader $11 billion CHIPS R&D effort to advance U.S. semiconductor leadership. Phase I awards fund small businesses to explore the technical feasibility of novel ideas for products or services in the commercial microelectronics marketplace. The program ran under NIST's existing SBIR authority, with total anticipated funding of approximately $54 million across all topics and phases.

Phase I awards were up to $283,500 per company (plus an optional $6,500 for Technical and Business Assistance). The period of performance is six months. Phase II, if awarded, extends to 24 months at up to $1,910,000. On September 19, 2024, CHIPS for America awarded nearly $5 million to 17 small businesses across nine states under this opportunity.

Eligibility is limited to for-profit small business concerns in the United States with under 500 employees, where more than 50% of equity is owned and controlled by U.S. citizens or permanent residents. Crucially, NIST has elected not to allow companies majority-owned by VCs, hedge funds, or PE firms to apply — this is stricter than some other federal SBIR programs. Each small business may submit only one application.

The application required full submission via Grants.gov by June 14, 2024. A single technical proposal covered both Phase I and Phase II objectives (Fast Track format for most topics). NIST evaluated proposals on technical merit, feasibility, and commercial potential. 17 Phase I awardees were selected; all were placed under consideration for Phase II awards in Spring 2025.

Key risks: the NOFO closed June 14, 2024 and Phase I awards were made in September 2024. There is no announced future cycle of this SBIR competition as of June 2026. Status is closed.