CHIPS for America (CHIPS Program Office / CHIPS R&D Office) logo
Program

CHIPS Incentives: Commercial Fabrication Facilities

Funds U.S. companies constructing, expanding, or modernizing commercial semiconductor fabrication facilities for leading-edge, current-generation, and mature-node chips.

CHIPS Incentives NOFO 1 was issued by the CHIPS Program Office within the U.S. Department of Commerce in February 2023, representing the first major funding opportunity under the $39 billion semiconductor incentives program authorized by the CHIPS and Science Act (signed August 9, 2022). In June 2023, the scope was widened to include facilities for semiconductor materials and manufacturing equipme…

Advanced ManufacturingSemiconductors

Each grant below is a distinct funding opportunity with its own eligibility, scope, and deliverables.

Last verified: 24 Jun 2026Source: www.nist.gov