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CHIPS Incentives — Semiconductor Materials & Equipment Facilities

CHIPS Incentives: Semiconductor Materials & Equipment NOFO

Invests in semiconductor materials and equipment manufacturers expanding domestic supply chain capacity.

The CHIPS Incentives Notice of Funding Opportunity for Facilities for Semiconductor Materials and Manufacturing Equipment is a live channel administered by the CHIPS Program Office at the U.S. Department of Commerce. Originally released September 30, 2023, the NOFO was reopened and amended on October 16, 2025 to reflect current program priorities. It targets upstream semiconductor supply chain par

Construction, expansion, or modernization of commercial facilities producing semiconductor materials and manufacturing equipment for U.S. supply chain resilience.

CycleiHow often this grant runs — e.g. annually, on a rolling basis, or a one-off call.One-off
Next deadlineiThe next date applications are due. Rolling means you can apply any time.1 Nov 2026
Decision timeiTypical time from the deadline to the funder's decision.
Project durationiHow long the funded work is expected to run.
Award typeiThe form of funding — grant, equity, loan, tax credit, etc.Grant
Match fundingiThe share of project costs you must cover yourself. 0% = fully funded.0%
Funding pooliThe total budget available across all awards in this round.

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Last verified: 24 Jul 2026Source: www.nist.gov