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Program

CHIPS Incentives — Semiconductor Materials & Equipment Facilities

Funds construction and expansion of domestic semiconductor materials and equipment manufacturing facilities.

CHIPS Incentives - Semiconductor Materials & Equipment Facilities is the upstream manufacturing channel in CHIPS for America, run by the U.S. Department of Commerce through the CHIPS Program Office. The program sits inside the $39 billion CHIPS incentives authority and is meant to strengthen domestic semiconductor supply chains by backing the facilities that make materials and equipment for U.S. c

HardwareAdvanced ManufacturingAdvanced MaterialsSemiconductors

Each grant below is a distinct funding opportunity with its own eligibility, scope, and deliverables.

Last verified: 28 May 2026Source: www.nist.gov