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CHIPS Incentives Program - Facilities for Semiconductor Materials and Manufacturing Equipment

Funds building or upgrading US facilities that make semiconductor materials or chip-making equipment.

National Institute of Standards and TechnologyUnited StatesCooperative agreement

The CHIPS Incentives Program funds projects that build, expand, or modernize U.S. commercial facilities that make semiconductor materials or semiconductor manufacturing equipment — not chip fabrication plants themselves, which this program funds under a separate notice. NIST's CHIPS Program Office runs the award, and Grants.gov lists it as a cooperative agreement, so the agency stays involved duri…

Semiconductors

Each grant below is a distinct funding opportunity with its own eligibility, scope, and deliverables.

Last verified: 27 Aug 2026Source: applications.chips.gov