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National Institute of Standards and Technology

CHIPS Incentives Program - Facilities for Semiconductor Materials and Manufacturing Equipment

Funds building or upgrading US facilities that make semiconductor materials or chip-making equipment.

OpenNational Institute of Standards and TechnologyUnited States

The CHIPS Incentives Program funds projects that build, expand, or modernize U.S. commercial facilities that make semiconductor materials or semiconductor manufacturing equipment β€” not chip fabrication plants themselves, which this program funds under a separate notice. NIST's CHIPS Program Office runs the award, and Grants.gov lists it as a cooperative agreement, so the agency stays involved duri…

Building, expanding, or modernizing U.S. commercial facilities that make semiconductor materials (like the chemicals, gases, and substrates used to fabricate chips) or semiconductor manufacturing equipment (the machines and tools used to make them) β€” not chip fabrication plants themselves.

CycleiHow often this grant runs β€” e.g. annually, on a rolling basis, or a one-off call.β€”
Next deadlineiThe next date applications are due. Rolling means you can apply any time.1 Nov 2026
Decision timeiTypical time from the deadline to the funder's decision.β€”
Project durationiHow long the funded work is expected to run.β€”
Award typeiThe form of funding β€” grant, equity, loan, tax credit, etc.Cooperative agreement
Match fundingiThe share of project costs you must cover yourself. 0% = fully funded.β€”
Funding pooliThe total budget available across all awards in this round.β€”

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Last verified: 16 Oct 2025Funder reference: 2023-NIST-CHIPS-SMME-01Source: www.grants.gov